FABRICATION OF FILM BULK ACOUSTIC RESONATORS ON SILICON LESS THAN110GREATER THAN WAFERS USING CRYSTALORIENTATION-DEPENDENT ANISOTROPIC ETCHING

Details for Australian Patent Application No. 2003272580 (hide)

Owner INTEL CORPORATION

Inventors WANG, Li-Peng; MA, Qing; YANKOVICH, Israel; BUTLER, Richard

Pub. Number AU-A-2003272580

PCT Number PCT/US03/29532

PCT Pub. Number WO2004/030208

Priority 10/254,402 25.09.02 US

Filing date 17 September 2003

Wipo publication date 19 April 2004

International Classifications

H03H 003/02 Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

H03H 009/17 Networks comprising electromechanical or electro-acoustic elements

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 10/254,402 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272580

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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