ELECTROSTATIC CHUCK HAVING A LOW LEVEL OF PARTICLE GENERATION AND METHOD OF FABRICATING SAME

Details for Australian Patent Application No. 2003272478 (hide)

Owner APPLIED MATERIALS, INC.

Inventors BOYD, Wendell, G., Jr.; MARIN, JoseAntonio; FANG, Ho, T.

Pub. Number AU-A-2003272478

PCT Number PCT/US03/29212

PCT Pub. Number WO2004/027839

Priority 10/247,599 19.09.02 US

Filing date 18 September 2003

Wipo publication date 8 April 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 10/247,599 19.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272478

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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