CIRCUIT ELEMENT HAVING A METAL SILICIDE REGION THERMALLY STABILIZED BY A BARRIER DIFFUSION MATERIAL

Details for Australian Patent Application No. 2003272444 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors WIECZOREK, Karsten; KAMMLER, Thorsten; HORSTMANN, Manfred

Pub. Number AU-A-2003272444

PCT Number PCT/US03/29031

PCT Pub. Number WO2004/032217

Priority 102 45 607.0 30.09.02 DE; 10/402,585 28.03.03 US

Filing date 19 September 2003

Wipo publication date 23 April 2004

International Classifications

H01L 021/285 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 102 45 607.0 30.09.02 DE; 10/402,585 28.03.03 US

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003272444

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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