QUARTZ-BASED NANORESONATORS AND METHOD OF FABRICATING SAME

Details for Australian Patent Application No. 2003272195 (hide)

Owner HRL LABORATORIES, LLC

Inventors CHANG, David, T; KIM, Jinsoo; KUBENA, Randall, L

Pub. Number AU-A-2003272195

PCT Number PCT/US03/13062

PCT Pub. Number WO2004/001849

Priority 60/376,995 30.04.02 US

Filing date 25 April 2003

Wipo publication date 6 January 2004

International Classifications

H01L 027/00 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 60/376,995 30.04.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003272195

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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