Owner SAMSUNG ELECTRONICS CO., LTD.

Inventors KANG, Myung-Koo

Pub. Number AU-A-2003272110

PCT Number PCT/KR03/02212

PCT Pub. Number WO2004/038775

Priority 10-2002-0064511 22.10.02 KR

Filing date 21 October 2003

Wipo publication date 13 May 2004

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/786 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

B23K 026/02 Working by laser beam, e.g. welding, cutting, boring - Positioning or observing the workpiece, e.g. with respect to the point of impact

C23C 016/24 Chemical deposition or plating by decomposition

C23C 016/48 Chemical deposition or plating by decomposition - by irradiation, e.g. photolysis, radiolysis, particle radiation

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof