A METHOD FOR DEPOSITING MULTILAYER COATINGS

Details for Australian Patent Application No. 2003271865 (hide)

Owner APPLIED MULTILAYERS LTD

Inventors TEER, Dennis

Pub. Number AU-A-2003271865

PCT Number PCT/GB03/04189

PCT Pub. Number WO2004/029324

Priority 0222331.1 26.09.02 GB

Filing date 26 September 2003

Wipo publication date 19 April 2004

International Classifications

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

C23C 014/50 Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 0222331.1 26.09.02 GB

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003271865

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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