METHOD FOR LITHOGRAPHICALLY STRUCTURING A SUBSTRATE, AND LACQUER SYSTEM

Details for Australian Patent Application No. 2003271518 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors ELIAN, Klaus; SCHUMANN, Jorg

Pub. Number AU-A-2003271518

PCT Number PCT/DE03/02880

PCT Pub. Number WO2004/025369

Priority 102 41 620.6 04.09.02 DE

Filing date 27 August 2003

Wipo publication date 30 April 2004

International Classifications

G03F 007/09 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - characterised by structural details, e.g. supports, auxiliary layers

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 102 41 620.6 04.09.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003271518

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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