VACUUM ARC SOURCE COMPRISING A DEVICE FOR GENERATING A MAGNETIC FIELD

Details for Australian Patent Application No. 2003271505 (hide)

Owner UNAXIS BALZERS AKTIENGESELLSCHAFT

Inventors SCHUTZE, Andreas; WOHLRAB, Christian

Pub. Number AU-A-2003271505

PCT Number PCT/CH03/00710

PCT Pub. Number WO2004/057642

Priority 2163/02 19.12.02 CH

Filing date 30 October 2003

Wipo publication date 14 July 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

22 January 2004 Complete Application Filed

  Priority application(s): 2163/02 19.12.02 CH

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003271505

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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