Work single wafer processing system

Details for Australian Patent Application No. 2003271187 (hide)

Owner Fuji Research Institute Corporation Hayashi, Takehide

Inventors Nakazawa, Seiichi

Pub. Number AU-A-2003271187

PCT Number PCT/JP03/13131

PCT Pub. Number WO2005/036617

Filing date 14 October 2003

Wipo publication date 27 April 2005

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 January 2004 Complete Application Filed

25 August 2005 Application Open to Public Inspection

  Published as AU-A-2003271187

29 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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