ULTRSONIC WASHING EQUIPMENT AND ULTRASONIC WASHING METHOD

Details for Australian Patent Application No. 2003271113 (hide)

Owner OKUNO, Shin SAKAKIBARA, Masato STAR CLUSTER CO., LTD. SHIBANO, Miyuki

Inventors OKUNO, Shin; SHIBANO, Miyuki; SAKAKIBARA, Masato

Pub. Number AU-A-2003271113

PCT Number PCT/JP03/12833

PCT Pub. Number WO2004/030838

Priority 2002-293252 07.10.02 JP

Filing date 7 October 2003

Wipo publication date 23 April 2004

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/12 Cleaning by methods involving the use or presence of liquid or steam - by sonic or ultrasonic vibrations

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 2002-293252 07.10.02 JP

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003271113

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name OKUNO, Shin; SAKAKIBARA, Masato; Corrigenda STAR CLUSTER CO., LTD.; SHIBANO, Miyuki, Application No. 2003271113, under INID (71) correct the name to read OKUNO, Shin; SAKAKIBARA, Masato; STAR CLUSTER CO., LTD.; SHIBANO, Miyuki; TSK CO.; AISIN AW CO., LTD.

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