METHOD AND APPARATUS FOR THE MONITORING AND CONTROL OF A SEMICONDUCTOR MANUFACTURING PROCESS

Details for Australian Patent Application No. 2003270866 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors PETERSON, Raymond; FUNK, Merritt

Pub. Number AU-A-2003270866

PCT Number PCT/US03/29980

PCT Pub. Number WO2004/031875

Priority 60/414,425 30.09.02 US

Filing date 25 September 2003

Wipo publication date 23 April 2004

International Classifications

G05B 019/418 Programme-control systems - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 60/414,425 30.09.02 US

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003270866

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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