METHOD AND SYSTEM FOR COMPENSATING FOR ANNEAL NONUNIFORMITIES

Details for Australian Patent Application No. 2003270760 (hide)

Owner VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.

Inventors RENAU, Anthony

Pub. Number AU-A-2003270760

PCT Number PCT/US03/29385

PCT Pub. Number WO2004/035807

Priority 10/272,166 16.10.02 US

Filing date 18 September 2003

Wipo publication date 4 May 2004

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 10/272,166 16.10.02 US

10 June 2004 Application Open to Public Inspection

  Published as AU-A-2003270760

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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