SYSTEM AND METHOD FOR REMOVING MATERIAL

Details for Australian Patent Application No. 2003270735 (hide)

Owner MATTSON TECHNOLOGY, INC.

Inventors DEVINE, Daniel, J.; RANFT, Craig; KADAVANICH, Andreas; GEORGE, Rene; ZAJAC, John

Pub. Number AU-A-2003270735

PCT Number PCT/US03/29275

PCT Pub. Number WO2004/027826

Priority 60/412,067 18.09.02 US

Filing date 16 September 2003

Wipo publication date 8 April 2004

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 60/412,067 18.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003270735

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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