CORRELATING AN INLINE PARAMETER TO A DEVICE OPERATION PARAMETER IN SEMICONDUCTOR PROCESSING

Details for Australian Patent Application No. 2003270664 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BODE, Christopher, A.; CHERRY, Gregory, A.; GOOD, Rick

Pub. Number AU-A-2003270664

PCT Number PCT/US03/28935

PCT Pub. Number WO2004/030081

Priority 10/254,209 25.09.02 US

Filing date 18 September 2003

Wipo publication date 19 April 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 10/254,209 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003270664

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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