METHOD FOR RADIATION TREATING AN OPTICAL SYSTEM

Details for Australian Patent Application No. 2003270216 (hide)

Owner CARL ZEISS SMT AG

Inventors GRUNER, Toralf; DOCHNAHL, Axel

Pub. Number AU-A-2003270216

PCT Number PCT/EP03/10362

PCT Pub. Number WO2005/036272

Filing date 18 September 2003

Wipo publication date 27 April 2005

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

15 January 2004 Complete Application Filed

16 June 2005 Application Open to Public Inspection

  Published as AU-A-2003270216

1 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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