DEVICE AND METHOD FOR LOCALLY MEASURING THE LAYER THICKNESS OF A SAMPLE AND/OR FOR LOCALLY MODIFYING THE THICKNESS THEREOF WITH AN ELECTRON BEAM

Details for Australian Patent Application No. 2003270131 (hide)

International Classifications

Event Publications

15 January 2004 Complete Application Filed

Priority application(s): 102 42 962.6 17.09.02 DE

27 May 2004 Application Open to Public Inspection

Published as AU-A-2003270131

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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