ARRANGEMENT FOR DETERMINING VARIATIONS IN LAYER THICKNESS

Details for Australian Patent Application No. 2003270110 (hide)

Owner ANALYTIK JENA AG

Inventors PFEIFER, Peter; ROGGE, Carsten; KILLENBERG-JABS, Margrit

Pub. Number AU-A-2003270110

PCT Number PCT/EP03/09468

PCT Pub. Number WO2004/025282

Priority 202 13 343.5 28.08.02 DE

Filing date 27 August 2003

Wipo publication date 30 April 2004

International Classifications

G01N 021/45 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 202 13 343.5 28.08.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003270110

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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