SILVER SELENIDE FILM STOICHIOMETRY AND MORPHOLOGY CONTROL IN SPUTTER DEPOSITION

Details for Australian Patent Application No. 2003270012 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors MCTEER, Allen; LI, Jiutao; HAMPTON, Keith

Pub. Number AU-A-2003270012

PCT Number PCT/US03/26814

PCT Pub. Number WO2004/020683

Priority 10/230,279 29.08.02 US

Filing date 28 August 2003

Wipo publication date 19 March 2004

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 10/230,279 29.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003270012

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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