METHOD OF FABRICATING A SELFALIGNED NON-VOLATILE MEMORY CELL

Details for Australian Patent Application No. 2003269929 (hide)

Owner ATMEL CORPORATION

Inventors LOJEK, Bohumil; RENNINGER, Alan, L.

Pub. Number AU-A-2003269929

PCT Number PCT/US03/24106

PCT Pub. Number WO2004/023543

Priority 10/236,670 06.09.02 US

Filing date 31 July 2003

Wipo publication date 29 March 2004

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/4763 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8247 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 10/236,670 06.09.02 US

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003269929

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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