METHOD FOR REGULATING ELECTRON BEAM OUTPUT OF ELECTRON SOURCES

Details for Australian Patent Application No. 2003269823 (hide)

Owner VON ARDENNE ANLAGENTECHNIK GMBH

Inventors DEUS, Carsten; HAUFE, Dietrich; NEUMANN, Matthias; NOBIS, Reinhard

Pub. Number AU-A-2003269823

PCT Number PCT/DE03/03041

PCT Pub. Number WO2004/027814

Priority 102 42 538.8 12.09.02 DE

Filing date 12 September 2003

Wipo publication date 8 April 2004

International Classifications

H01J 037/302 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 102 42 538.8 12.09.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003269823

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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