METHOD FOR PRODUCING SEMICONDUCTING DEVICES AND DEVICES OBTAINED WITH THIS METHOD

Details for Australian Patent Application No. 2003269667 (hide)

Owner UNAXIS BALZERS LTD.

Inventors KROLL, Ulrich; BUCHER, Cedric; SCHMITT, Jacques; POPPELLER, Markus; HOLLENSTEIN, Christoph; BALLUTAUD, Juliette; HOWLING, Alan

Pub. Number AU-A-2003269667

PCT Number PCT/CH03/00685

PCT Pub. Number WO2004/038774

Priority 60/421,171 25.10.02 US; 60/439,764 13.01.03 US; 60/476,670 06.06.03 US

Filing date 22 October 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 60/421,171 25.10.02 US; 60/439,764 13.01.03 US; 60/476,670 06.06.03 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003269667

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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