METHOD FOR PRODUCING A STEPPED EDGE PROFILE COMPRISED OF A LAYERED CONSTRUCTION.

Details for Australian Patent Application No. 2003269664 (hide)

Owner ABB SCHWEIZ AG

Inventors ASSAL, Jerome; EICHER, Simon; NANSER, Erich

Pub. Number AU-A-2003269664

PCT Number PCT/CH03/00681

PCT Pub. Number WO2004/038796

Priority 02405909.9 23.10.02 EP

Filing date 17 October 2003

Wipo publication date 13 May 2004

International Classifications

H01L 023/485 Details of semiconductor or other solid state devices

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 02405909.9 23.10.02 EP

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003269664

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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