NEUTRAL PARTICLE BEAM PROCESSING APPARATUS WITH ENHANCED CONVERSION PERFORMANCE FROM PLASMA IONS TO NEUTRAL PARTICLES

Details for Australian Patent Application No. 2003269548 (hide)

Event Publications

15 January 2004 Complete Application Filed

Priority application(s): 10-2002-0062648 15.10.02 KR

10 June 2004 Application Open to Public Inspection

Published as AU-A-2003269548

30 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

Applications OPI - Name Index Under the name SEM TECHNOLOGY CO., LTD, Application No. 2003269548, under INID (71) correct the name to read LEE, Hag-Joo; SEM TECHNOLOGY CO., LTD

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