INSTALLATION FOR THE VACUUM TREATMENT OF SUBSTRATES

Details for Australian Patent Application No. 2003269048 (hide)

Owner TECMACHINE

Inventors POIRSON, Jean-Marc; FOUREZON, Gilles

Pub. Number AU-A-2003269048

PCT Number PCT/FR03/02320

PCT Pub. Number WO2004/013375

Priority 02/09955 01.08.02 FR

Filing date 23 July 2003

Wipo publication date 23 February 2004

International Classifications

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

15 January 2004 Complete Application Filed

  Priority application(s): 02/09955 01.08.02 FR

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003269048

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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