METHOD FOR PROCESSING SUBSTRATE

Details for Australian Patent Application No. 2003268637 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ENJOJI, Keiichi; YUASA, Mitsuhiro

Pub. Number AU-A-2003268637

PCT Number PCT/JP03/11627

PCT Pub. Number WO2004/024619

Priority 2002/265650 11.09.02 JP

Filing date 11 September 2003

Wipo publication date 30 April 2004

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

H01L 021/301 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 2002/265650 11.09.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003268637

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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