REFLECTIVE X-RAY MICROSCOPE AND INSPECTION SYSTEM FOR EXAMINING OBJECTS WITH WAVELENGTHS OF= 100NM

Details for Australian Patent Application No. 2003268097 (hide)

Event Publications

8 January 2004 Complete Application Filed

Priority application(s): 102 20 816.6 10.05.02 DE; 102 20 815.8 10.05.02 DE

15 January 2004 Application Open to Public Inspection

Published as AU-A-2003268097

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

Applications OPI - Name Index Under the name CARL ZEISS SMT AG, Application No. 2003268097, under INID (71) correct the name to read CARL ZEISS MICROELECTRONIC SYSTEMS GMBH; Carl Zeiss SMS GmbH

3 December 2009 Corrigenda

Applications OPI - Name Index Under the name Carl Zeiss SMS Gmbh, Application No. 20032680971, under INID (43) correct the Publication Date to read 24.11.2003.

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