Passive temperature compensation techqnique for MEMS devices

Details for Australian Patent Application No. 2003267956 (hide)

International Classifications

Event Publications

8 January 2004 Complete Application Filed

Priority application(s): 10/135,538 30.04.02 US

26 February 2004 Application Open to Public Inspection

Published as AU-B-2003267956

27 April 2006 Application Accepted

Published as AU-B-2003267956

24 August 2006 Standard Patent Sealed

27 November 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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