METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WITH FIELD ISOLATION REGIONS CONSISTING OF GROOVES FILLED WITH ISOLATING MATERIAL

Details for Australian Patent Application No. 2003267709 (hide)

Owner KONINKLIJKE PHILIPS ELECTRONICS N.V.

Inventors ROOYACKERS, Rita, V., T.; SCHMITZ, Jurriaan; RAVIT, Claire

Pub. Number AU-A-2003267709

PCT Number PCT/IB03/04303

PCT Pub. Number WO2004/032226

Priority 02079084.6 03.10.02 EP

Filing date 30 September 2003

Wipo publication date 23 April 2004

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 02079084.6 03.10.02 EP

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003267709

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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