METHOD AND APPARATUS FOR CLEANING AN ANALYTICAL INSTRUMENT WHILE OPERATING THE ANALYTICAL INSTRUMENT

Details for Australian Patent Application No. 2003267289 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors PARRAN, Shachar; YAIR, Itzak

Pub. Number AU-A-2003267289

PCT Number PCT/US03/29396

PCT Pub. Number WO2004/062824

Priority 60/438,938 08.01.03 US; 10/365,130 11.02.03 US

Filing date 16 September 2003

Wipo publication date 10 August 2004

International Classifications

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 60/438,938 08.01.03 US; 10/365,130 11.02.03 US

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003267289

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS ISRAEL, LTD., Application No. 2003267289, under INID (71) correct the name to read APPLIED MATERIALS ISRAEL, LTD.; APPLIED MATERIALS, INC.

22 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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