EDDY CURRENT BASED MEASUREMENT CAPABILITIES

Details for Australian Patent Application No. 2003267272 (hide)

Owner LAM RESEARCH CORPORATION

Inventors GOTKIS, Yehiel; KISTLER, Rodney; OWCZARZ, Aleksander; HEMKER, David; BRIGHT, Nicolas, J.

Pub. Number AU-A-2003267272

PCT Number PCT/US03/29284

PCT Pub. Number WO2004/029606

Priority 10/256,055 25.09.02 US

Filing date 15 September 2003

Wipo publication date 19 April 2004

International Classifications

G01N 027/02 Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means - by investigating impedance

G01N 027/90 Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means - using eddy currents

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 10/256,055 25.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003267272

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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