SYSTEM AND METHOD FOR MONITORING THIN FILM DEPOSITION ON OPTICAL SUBSTRATES

Details for Australian Patent Application No. 2003267153 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors ANDERSON, Carl, D.

Pub. Number AU-A-2003267153

PCT Number PCT/US03/28647

PCT Pub. Number WO2004/025219

Priority 10/238,225 10.09.02 US

Filing date 10 September 2003

Wipo publication date 30 April 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 10/238,225 10.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003267153

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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