A METHOD OF FORMING SHALLOW TRENCH ISOLATION STRUCTURE IN A SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003267086 (hide)

Owner ATMEL CORPORATION

Inventors KELKAR, Amit, S.; LARSEN, Bradley, J.; BARRY, Timothy, M.; DEGORS, Nicolas; ERICKSON, Donald, A.

Pub. Number AU-A-2003267086

PCT Number PCT/US03/28336

PCT Pub. Number WO2004/038791

Priority 10/278,294 22.10.02 US

Filing date 9 September 2003

Wipo publication date 13 May 2004

International Classifications

H01L 021/76 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/461 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 10/278,294 22.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003267086

7 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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