BINARY BLAZED DIFFRACTIVE OPTICAL ELEMENT

Details for Australian Patent Application No. 2003267004 (hide)

Owner CARL ZEISS SMT AG

Inventors ARNOLD, Ralf; KLEEMANN, Bernd

Pub. Number AU-A-2003267004

PCT Number PCT/EP03/09285

PCT Pub. Number WO2004/025335

Priority 102 38 916.0 24.08.02 DE; 103 13 548.0 26.03.03 DE

Filing date 21 August 2003

Wipo publication date 30 April 2004

International Classifications

G02B 005/18 Optical elements other than lenses - Diffracting gratings

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 102 38 916.0 24.08.02 DE; 103 13 548.0 26.03.03 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003267004

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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