ILLUMINATION SYSTEM HAVING A MORE EFFICIENT COLLECTOR OPTIC

Details for Australian Patent Application No. 2003266975 (hide)

Owner CARL ZEISS SMT AG

Inventors SINGER, Wolfgang

Pub. Number AU-A-2003266975

PCT Number PCT/EP03/08968

PCT Pub. Number WO2004/057424

Priority 102 60 077.5 19.12.02 DE

Filing date 13 August 2003

Wipo publication date 14 July 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 102 60 077.5 19.12.02 DE

19 August 2004 Application Open to Public Inspection

  Published as AU-A-2003266975

8 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003266976-COMPOSITION AND DEVICE FOR DAMPENING MECHANICAL MOTION

2003266974-METHOD FOR CHANNEL ESTIMATION AND CORRESPONDING RADIO COMMUNICATION SYSTEM