METHOD AND APPARATUS FOR GENERATING AND MAINTAINING A PLASMA

Details for Australian Patent Application No. 2003266866 (hide)

Owner VLAAMSE INSTELLING VOOR TECHNOLOGISCH ONDERZOEK (VITO)

Inventors PAULUSSEN, Sabine; GOOSSENS, Olivier; VANGENEUGDEN, Dirk

Pub. Number AU-A-2003266866

PCT Number PCT/BE03/00156

PCT Pub. Number WO2004/028220

Priority 60/412,242 19.09.02 US

Filing date 19 September 2003

Wipo publication date 8 April 2004

International Classifications

H05H 001/24 Generating plasma - Generating plasma

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

8 January 2004 Complete Application Filed

  Priority application(s): 60/412,242 19.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266866

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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