ELECTROSTATIC HOLDING DEVICE AND ELECTROSTATIC TWEEZERS USING SAME

Details for Australian Patent Application No. 2003266610 (hide)

Owner TSUKUBA SEIKO LTD.

Inventors UBUKATA, Tamaya; POH, Fow-Lai

Pub. Number AU-A-2003266610

PCT Number PCT/JP03/12225

PCT Pub. Number WO2004/030197

Priority 2003-131016 09.05.03 JP; 2002-282483 27.09.02 JP

Filing date 25 September 2003

Wipo publication date 19 April 2004

International Classifications

H02N 013/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B65G 049/07 Conveying systems characterised by their application for specified purposes not otherwise provided for - for semiconductor wafers

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 2003-131016 09.05.03 JP; 2002-282483 27.09.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266610

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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