SUBSTRATE PROCESSING APPARATUS

Details for Australian Patent Application No. 2003266566 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HORIGUCHI, Takahiro; KUWAJIMA, Ryo

Pub. Number AU-A-2003266566

PCT Number PCT/JP03/12086

PCT Pub. Number WO2004/030066

Priority 2002-278200 24.09.02 JP

Filing date 22 September 2003

Wipo publication date 19 April 2004

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/46 Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 2002-278200 24.09.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266566

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003266567-CROSS FLOW FAN AND AIR CONDITIONER WITH THE FAN

2003266565-SUBSTRATE PROCESSING APPARATUS