MEMBER FOR PLASMA ETCHING DEVICE AND METHOD FOR MANUFACTURE THEREOF

Details for Australian Patent Application No. 2003266517 (hide)

Owner SHIN-ETSU QUARTZ PRODUCTS CO., LTD.

Inventors ARAKI, Itsuo; INAKI, Kyoichi

Pub. Number AU-A-2003266517

PCT Number PCT/JP03/11768

PCT Pub. Number WO2005/029564

Filing date 16 September 2003

Wipo publication date 11 April 2005

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 December 2003 Complete Application Filed

26 May 2005 Application Open to Public Inspection

  Published as AU-A-2003266517

1 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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