THIN FILM AND METHOD FOR MANUFACTURING SAME

Details for Australian Patent Application No. 2003266511 (hide)

Owner KYOTO INSTRUMENTS CO., LTD.

Inventors ISHIDA, Kenji; MATSUSHIGE, Kazumi; KIMURA, Kuniko; KOBAYASHI, Kei; YAMADA, Hirofumi; HORIUCHI, Toshihisa

Pub. Number AU-A-2003266511

PCT Number PCT/JP03/11670

PCT Pub. Number WO2004/026459

Priority 2002-307663 12.09.02 JP

Filing date 11 September 2003

Wipo publication date 8 April 2004

International Classifications

B01J 019/00 Chemical, physical, or physico-chemical processes in general

B82B 003/00 Manufacture or treatment of nano-structures

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 2002-307663 12.09.02 JP

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266511

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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