HIGH-K DIELECTRIC FILM, METHOD OF FORMING THE SAME AND RELATED SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003266410 (hide)

Owner INFINEON TECHNOLOGIES AG

Inventors LIM, Chan; LEE, Kilho

Pub. Number AU-A-2003266410

PCT Number PCT/EP03/50352

PCT Pub. Number WO2005/015621

Filing date 30 July 2003

Wipo publication date 25 February 2005

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/51 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

18 December 2003 Complete Application Filed

7 April 2005 Application Open to Public Inspection

  Published as AU-A-2003266410

13 April 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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