METHOD AND DEVICE FOR PRODUCING EXPOSED STRUCTURES

Details for Australian Patent Application No. 2003266296 (hide)

Owner KLEO HALBLEITERTECHNIK GMBH AND CO KG

Inventors OPOWER, Hans; SCHARL, Stefan; LEINENBACH, Dirk

Pub. Number AU-A-2003266296

PCT Number PCT/EP03/09215

PCT Pub. Number WO2004/029721

Priority 102 42 142.0 03.09.02 DE

Filing date 20 August 2003

Wipo publication date 19 April 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 102 42 142.0 03.09.02 DE

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266296

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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