INTERFEROMETRY METHOD FOR ELLIPSOMETRY, REFLECTOMETRY, AND SCATTEROMETRY MEASUREMENTS, INCLUDING CHARACTERIZATION OF THIN FILM STRUCTURES

Details for Australian Patent Application No. 2003266136 (hide)

Owner ZYGO CORPORATION

Inventors DE GROOT, Peter, J.

Pub. Number AU-A-2003266136

PCT Number PCT/US03/28484

PCT Pub. Number WO2004/023071

Priority 60/409,147 09.09.02 US

Filing date 9 September 2003

Wipo publication date 29 March 2004

International Classifications

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 60/409,147 09.09.02 US

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003266136

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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