ILLUMINATION SYSTEM FOR OPTICAL INSPECTION

Details for Australian Patent Application No. 2003265989 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD.

Inventors NAFTALI, Ron; GUETTA, Avishay; FELDMAN, Haim; SHOHAM, Doron

Pub. Number AU-A-2003265989

PCT Number PCT/US03/28054

PCT Pub. Number WO2004/031741

Priority 60/415,082 30.09.02 US

Filing date 8 September 2003

Wipo publication date 23 April 2004

International Classifications

G01N 021/00 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 60/415,082 30.09.02 US

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003265989

16 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS ISRAEL, LTD., Application No. 2003265989, under INID (71) correct the name to read APPLIED MATERIALS ISRAEL, LTD.; APPLIED MATERIALS, INC.

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