NITROGEN SOURCES FOR MOLECULAR BEAM EPITAXY

Details for Australian Patent Application No. 2003265887 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors JOHNSON, Ralph, H.; GUENTER, James, K.; KIM, Jin, K.

Pub. Number AU-A-2003265887

PCT Number PCT/US03/27463

PCT Pub. Number WO2004/022819

Priority 10/233,625 04.09.02 US

Filing date 4 September 2003

Wipo publication date 29 March 2004

International Classifications

C30B 023/02 Single-crystal growth from vapours - Epitaxial-layer growth

C30B 029/40 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

H01L 021/203 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 10/233,625 04.09.02 US

13 May 2004 Application Open to Public Inspection

  Published as AU-A-2003265887

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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