METHOD AND APPARATUS FOR ELECTROLESS DEPOSITION WITH TEMPERATURE-CONTROLLED CHUCK

Details for Australian Patent Application No. 2003265687 (hide)

Owner BLUE29 CORPORATION

Inventors IVANOV, Igor, C.; ZHANG, Jonathan, Weiguo; KOLICS, Artur

Pub. Number AU-A-2003265687

PCT Number PCT/US03/26698

PCT Pub. Number WO2004/024983

Priority 10/242,331 13.09.02 US

Filing date 26 August 2003

Wipo publication date 30 April 2004

International Classifications

C23C 018/16 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating - by reduction or substitution, i.e. electroless plating

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 10/242,331 13.09.02 US

20 May 2004 Application Open to Public Inspection

  Published as AU-A-2003265687

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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