PROCESS AND APPARATUS FOR PULSED DC MAGNETRON REACTIVE SPUTTERING OF THIN FILM COATINGS ON LARGE SUBSTRATES USING SMALLER SPUTTER CATHODES

Details for Australian Patent Application No. 2003265503 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors JESSE, D., Wolfe; BRYAN, Steven, Rex

Pub. Number AU-A-2003265503

PCT Number PCT/US03/25992

PCT Pub. Number WO2004/017356

Priority Not Given 18.08.03 US; 60/403,902 16.08.02 US

Filing date 18 August 2003

Wipo publication date 3 March 2004

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): Not Given 18.08.03 US; 60/403,902 16.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003265503

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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