METHOD AND APPARATUS FOR THIN FILM THICKNESS MAPPING

Details for Australian Patent Application No. 2003265462 (hide)

Owner HYPERNEX, INC.

Inventors KOZACZEK, Krzysztof, J.; KURTZ, David, S.; MORAN, Paul, R.; MARTIN, Roger, I.; DEHAVEN, Patrick, W.; RODBELL, Kenneth, P.; MALHOTRA, Sandra, G.

Pub. Number AU-A-2003265462

PCT Number PCT/US03/25769

PCT Pub. Number WO2004/018959

Priority 10/225,534 21.08.02 US

Filing date 15 August 2003

Wipo publication date 11 March 2004

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 10/225,534 21.08.02 US

22 April 2004 Application Open to Public Inspection

  Published as AU-A-2003265462

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

25 August 2005 Corrigenda

  Applications OPI - Name Index Under the name HYPERNEX, INC., Application No. 2003265462, under INID (71) correct the name to read INTERNATIONAL BUSINESS MACHINES CORP.; HYPERNEX, INC.

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