HIGH THROUGHPUT DEPOSITION APPARATUS

Details for Australian Patent Application No. 2003265277 (hide)

Owner ENERGY CONVERSION DEVICES, INC.

Inventors HOFFMAN, Kevin; DOEHLER, Joachim; LYCETTE, Mark; KEY, James; OVESHINSKY, Herbert, C.

Pub. Number AU-A-2003265277

PCT Number PCT/US03/22090

PCT Pub. Number WO2004/020687

Priority 10/228,542 27.08.02 US

Filing date 14 July 2003

Wipo publication date 19 March 2004

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 10/228,542 27.08.02 US

6 May 2004 Application Open to Public Inspection

  Published as AU-A-2003265277

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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