TRANSPARENT MICROPOROUS MATERIALS FOR CMP

Details for Australian Patent Application No. 2003264819 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors PRASAD, Abaneshwar

Pub. Number AU-A-2003264819

PCT Number PCT/IB03/04476

PCT Pub. Number WO2004/037490

Priority 10/282,489 28.10.02 US

Filing date 6 October 2003

Wipo publication date 13 May 2004

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/12 Measuring - involving optical means

B24D 007/12 Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 10/282,489 28.10.02 US

17 June 2004 Application Open to Public Inspection

  Published as AU-A-2003264819

14 July 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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