CATHODE FOR VACUUM SPUTTERING TREATMENT MACHINE

Details for Australian Patent Application No. 2003264692 (hide)

Owner TECMACHINE

Inventors AULAGNER, Michel; LABALME, Lionel

Pub. Number AU-A-2003264692

PCT Number PCT/FR03/02110

PCT Pub. Number WO2004/008478

Priority 02/08868 10.07.02 FR

Filing date 8 July 2003

Wipo publication date 2 February 2004

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

18 December 2003 Complete Application Filed

  Priority application(s): 02/08868 10.07.02 FR

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003264692

9 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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